1 March 1974 Technological Advances In Microcircuit Step And Repeat Cameras And Their Relationship To The Future Needs Of The Semiconductor Industry
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Abstract
The step and repeat camera specifically designed for the production of semiconductor integrated circuits today transcends all technological boundaries in its capabilities for meeting demands which are difficult to comprehend, even to those of us who design and use them on a daily basis. We speak in terms of "quarter micron" repeatability like a lathe hand speaks of "plus or minus a mil". Yet the magnitude of a quarter micron is so small that an objective lens with a numerical aperture of 0.57 is required to theoretically resolve it. Such a lens would have an equivalent f stop of f:0.9. While the analogy may not be accurate, the impact of the technogical requirements of the semiconductor industry may be reflected in such exhaustive and even exaggerated demands.
© (1974) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Wing, Thomas Wing, } "Technological Advances In Microcircuit Step And Repeat Cameras And Their Relationship To The Future Needs Of The Semiconductor Industry", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); doi: 10.1117/12.954248; https://doi.org/10.1117/12.954248
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