Functional descriptions of laser interferometers are presented. The specific application of a Hewlett-Packard Interferometer to the evaluation of the x axis motion of a scanning microdensitometer is detailed. Results of the analysis are discussed. Extensions to some other areas of metrology are given.
John O. Bumgarner,
"Applications Of Laser Interferometry To Metrology", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954395; https://doi.org/10.1117/12.954395