20 October 1975 Applications Of Laser Interferometry To Metrology
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Proceedings Volume 0060, Solving Quality Control and Reliability Problems with Optics; (1975) https://doi.org/10.1117/12.954395
Event: Solving Quality Control and Reliability Problems with Optics, 1975, San Diego, United States
Abstract
Functional descriptions of laser interferometers are presented. The specific application of a Hewlett-Packard Interferometer to the evaluation of the x axis motion of a scanning microdensitometer is detailed. Results of the analysis are discussed. Extensions to some other areas of metrology are given.
© (1975) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John O. Bumgarner, "Applications Of Laser Interferometry To Metrology", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954395; https://doi.org/10.1117/12.954395
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