20 October 1975 Applications Of Laser Interferometry To Metrology
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Proceedings Volume 0060, Solving Quality Control and Reliability Problems with Optics; (1975) https://doi.org/10.1117/12.954395
Event: Solving Quality Control and Reliability Problems with Optics, 1975, San Diego, United States
Abstract
Functional descriptions of laser interferometers are presented. The specific application of a Hewlett-Packard Interferometer to the evaluation of the x axis motion of a scanning microdensitometer is detailed. Results of the analysis are discussed. Extensions to some other areas of metrology are given.
© (1975) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John O. Bumgarner, John O. Bumgarner, } "Applications Of Laser Interferometry To Metrology", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954395; https://doi.org/10.1117/12.954395
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