Machined Surface Profile Measurement Using Grazing-Angle Illumination

T. Sawatari

doi:10.1117/12.954385

20 October 1975 Machined Surface Profile Measurement Using Grazing-Angle Illumination

T. Sawatari

Proceedings Volume 0060, Solving Quality Control and Reliability Problems with Optics; (1975) https://doi.org/10.1117/12.954385
Event: Solving Quality Control and Reliability Problems with Optics, 1975, San Diego, United States

Abstract

High grazing-angle illumination interferometry is described. Two applications are discussed: microscopic surface profile measurement of machined surfaces (ground, one-dimensional), and observation of macroscopic surface deviations. In both applications it is shown that the grazing angle interferometry is applicable to objects having surface roughness up to 5-7pm (RMS).

Citation Download Citation

T. Sawatari "Machined Surface Profile Measurement Using Grazing-Angle Illumination", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); https://doi.org/10.1117/12.954385

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