20 September 1976 Evaluation Of Rank Prismatic Lens
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In practical microcircuitry a two-dimensional source array is necessary to cater for various types and directional orientation of optical features at the image plane. Configurations successfully applied are the annulus and a distribution of sources at the points of a hexagon and an octagon. In each case a single concentrated mercury arc lamp is used as prime source and effectively multiplied or extended by optical means.
© (1976) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard A. Rosenthal, Richard A. Rosenthal, } "Evaluation Of Rank Prismatic Lens", Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); doi: 10.1117/12.954828; https://doi.org/10.1117/12.954828

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