16 December 1976 Metrology Of A Diamond Turned Toric Resonator Component
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We describe the set up and measurement techniques to evaluate a diamond turned 300 mm diameter copper toroid. A single beam interferometer, rotary table, and Moore measuring machine were used to measure the circular flatness of 0.63 μm (25 μ") and 30 nm (1.2 μ") rms figure deviation. A computer program was used to evaluate the figure and absolute average slope error of 12 μrad.
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Theodore T. Saito, Theodore T. Saito, Jones Arnold, Jones Arnold, "Metrology Of A Diamond Turned Toric Resonator Component", Proc. SPIE 0093, Advances in Precision Machining of Optics, (16 December 1976); doi: 10.1117/12.955127; https://doi.org/10.1117/12.955127

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