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8 August 1977 Future Possibilities Of Dioptric Lenses In Microelectronics
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Abstract
After a survey of the present state of optics in microelectronics future possibilities especially of dioptric lenses are discussed. Those lenses are marked mainly by the numerical aperture providing the resolution, and the diameter of image field. The numerical aper-ture seems to have a usefull limit between 0.4 and 0.5, providing minimum line widths of 0.4 to 0.7 microns. A future limit of field sizes cannot be given today. The possibility to develop new lenses is not only given by the capability of the optical designer, but also by other parameters, such as mechanical size limitations and lens manufactoring problems.
© (1977) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Ittner "Future Possibilities Of Dioptric Lenses In Microelectronics", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); https://doi.org/10.1117/12.955361
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