Process Control In The Production Of Hard Surface Photomasks

Jim Dey; Ken Harrison

doi:10.1117/12.955347

8 August 1977 Process Control In The Production Of Hard Surface Photomasks

Jim Dey, Ken Harrison

Proceedings Volume 0100, Developments in Semiconductor Microlithography II; (1977) https://doi.org/10.1117/12.955347
Event: Developments in Semiconductor Microlithography II, 1977, San Jose, United States

Abstract

Conventional techniques of process control are inadequate for the production of modern hard surface photomasks because they do not accommodate all the variables and because, even utilizing the tightest controls practical, the total variability of the process exceeds the allowable variability of the final product. A system of interactive process control has been developed and put into operation. This system uses the characteristics of the outgoing product in a negative feed-back loop to keep the process stabilized and properly adjusted. A mathematical model of the process is used to convert product data into changes in process parameters. A computerized reporting system keeps the process engineer informed of changes in mask quality and yield.

Citation Download Citation

Jim Dey and Ken Harrison "Process Control In The Production Of Hard Surface Photomasks", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); https://doi.org/10.1117/12.955347

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available