8 August 1977 Projection Photolithography Of Large CCD Arrays
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Abstract
The topic of this presentation is the photolithographic aspect of fabricating CCD arrays. CCD stands for Charge-Coupled Device, which is a relatively new type of semiconductor device. The basic CCD device is an analog shift register. In the same manner a digital shift register is used to delay or buffer a stream of digital data, a CCD can be used to delay an analog signal.
© (1977) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Don Baylis, Don Baylis, } "Projection Photolithography Of Large CCD Arrays", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955364; https://doi.org/10.1117/12.955364
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