The topic of this presentation is the photolithographic aspect of fabricating CCD arrays. CCD stands for Charge-Coupled Device, which is a relatively new type of semiconductor device. The basic CCD device is an analog shift register. In the same manner a digital shift register is used to delay or buffer a stream of digital data, a CCD can be used to delay an analog signal.
Don Baylis, Don Baylis,
"Projection Photolithography Of Large CCD Arrays", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955364; https://doi.org/10.1117/12.955364