8 August 1977 Projection Photolithography Of Large CCD Arrays
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The topic of this presentation is the photolithographic aspect of fabricating CCD arrays. CCD stands for Charge-Coupled Device, which is a relatively new type of semiconductor device. The basic CCD device is an analog shift register. In the same manner a digital shift register is used to delay or buffer a stream of digital data, a CCD can be used to delay an analog signal.
© (1977) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Don Baylis, Don Baylis, "Projection Photolithography Of Large CCD Arrays", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955364; https://doi.org/10.1117/12.955364

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