10 August 1977 Design And Construction Of A Phase-Locked Interference Microscope
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Proceedings Volume 0103, Systems Integration and Optical Design: Another Look; (1977); doi: 10.1117/12.955401
Event: 1977 SPIE/SPSE Technical Symposium East, 1977, Reston, United States
Abstract
An A.C. interference microscope based on a technique called phase-locked interferometry has been constructed. The instrument is capable of detecting phase differences approaching λ/100. It may be used for measuring surface features (roughness, curvature) or transparent phase objects such as gradient index materials, microballoons and biological samples.
© (1977) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Glen W. Johnson, Duncan T. Moore, "Design And Construction Of A Phase-Locked Interference Microscope", Proc. SPIE 0103, Systems Integration and Optical Design: Another Look, (10 August 1977); doi: 10.1117/12.955401; https://doi.org/10.1117/12.955401
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KEYWORDS
Sensors

Microscopes

Modulation

Signal detection

Interferometers

Fringe analysis

Wavefronts

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