An infrared MicroImager was originally introduced at SPIE in 1972. The operation of the instrument is reviewed. The application of the MicroImager in integrated circuits thermal analysis is discussed. Quantitative data relative to actual surface temperature of integrated circuits is available from infrared observations. Thermal signatures of integrated circuits obtained from MicroImager observations provide valuable information to circuit designers, process engineers and failure analysts. Thermal signatures support theoretical conclusions regarding thermal distrihutio by presenting empirical observations.
Richard F . Leftwich,
Cal A. Lidback,
"The Infrared Microimager And Integrated Circuits", Proc. SPIE 0104, Multidisciplinary Microscopy, (26 August 1977); doi: 10.1117/12.955426; https://doi.org/10.1117/12.955426