This paper deals with the various approaches taken to achieve hard overcoats or all dielectric optical thin film multilavers in replicated optics. It concludes that not much can be done to improve on conventional coating methods. The prerequisites for hard dielectric films still are a good vacuum and elevated substrate temperatures. To make these coatings readily available for reflective or refractive replicated components, a suitable release layer has to be found which will be compatible with temperatures of at least 300°C. at 1 x 10-6 torr. In addition, the release layer will have to be resilient enough in order to offer minimum adhesion to high surface tension dielectric stacks of any number of layers.