28 February 1978 Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying
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Proceedings Volume 0129, Effective Utilization of Optics in Quality Assurance I; (1978) https://doi.org/10.1117/12.956019
Event: Effective Utilization of Optics in Quality Assurance, 1977, Arlington Heights, United States
Abstract
A brief discussion on a unique electronic measurement system recently developed for the semi-conductor industry and other applications where materials must be fashioned in extremely small dimensions.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lewis C. Page, Lewis C. Page, } "Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying", Proc. SPIE 0129, Effective Utilization of Optics in Quality Assurance I, (28 February 1978); doi: 10.1117/12.956019; https://doi.org/10.1117/12.956019
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