15 December 1978 A Non-Contact Method For Surface Profile Measurement And Angular Deflection Monitoring Using A Scanning Laser Beam
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Abstract
A method for measuring the surface profile of a reflecting surface is presented. The technique involves comparing, in the time domain, a surface reflected laser beam to a reference beam. The comparison is made by alternately scanning both beams across an optical detector and measuring their phase relationship electronically. From this information and by scanning along a line, the surface profile in a plane can be determined. The accuracy of the method falls between mechanical contact techniques and more sophisticated interferometric schemes. Precision of microns with dynamic range of millimeters or more can be achieved. A brief theoretical analysis is presented as well as the result of several experimental tests. This method can be useful in such applications as measuring the profile of the human cornea and other delicate materials where non-contact is obligatory and in determining the surface contour of optical components or of any other reflecting surface. Precise monitoring of angular deflection is also possible with this technique.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francisco M. Smolka, Thomas P. Caudell, "A Non-Contact Method For Surface Profile Measurement And Angular Deflection Monitoring Using A Scanning Laser Beam", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938210; https://doi.org/10.1117/12.938210
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