15 December 1978 Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces
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Abstract
Using a heterodyne interferometer of unique design, high precision measurements of optical surfaces while undergoing deformation have been obtained. The device is described and results of various investigations are presented.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. A. Massie, "Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938227; https://doi.org/10.1117/12.938227
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