Paper
15 December 1978 Surface Finish From Reflected Laser Light
H. S. Corey
Author Affiliations +
Abstract
The characteristics of reflectance patterns generated when a laser beam strikes a machined surface contain adequate information to determine the degree of surface finish. An 'extensive development endeavor has established equipment and procedures required to properly extract data from reflectance patterns to obtain a repeatable correlation between the gleaned information and surface finish. Two types of reflective patterns have been utilized: diffracted reflection from single-point-turned periodic surfaces, and diffuse reflection from random-ground or honed surfaces. Surface finishes ranging from 0.025 to 2 micrometers (1 to 80 microinches), AA, have been measured by using visible laser radiation on the finer surfaces and infrared lasers on rougher materials. Using this method to measure a surface finish provides a noncontact procedure and does not require critical alignment as is often the case when using a stylus instrument on curved surfaces. Data have been obtained by making full-pattern scans, then integrating the area under the curves and by measuring the intensity ratio at two predetermined points. Calibration curves rtave lbeen developed that produce straight lines on log-log graph paper. Also, production inspection equipment has been fabricated to measure the surface finish of parts by the ratio method.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. S. Corey "Surface Finish From Reflected Laser Light", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); https://doi.org/10.1117/12.938212
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Surface finishing

Reflectivity

Sensors

Calibration

Electromechanical design

Optical metrology

Laser metrology

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