15 December 1978 The Use Of Microdensitometers As A Basis For Highly Accurate Metrology
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Proceedings Volume 0153, Advances in Optical Metrology I; (1978); doi: 10.1117/12.938211
Event: 22nd Annual Technical Symposium, 1978, San Diego, United States
Abstract
Microdensitometers have already solved the problem of maintaining high spped and high accuracy across large regions of space. Modifications are needed to operate with much higher speed and in the reflection mode. Experimental results confirm accuracies better than 0.1 gm over areas over 40 cm.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. J. Caulfield, David L. Kryger, "The Use Of Microdensitometers As A Basis For Highly Accurate Metrology", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938211; https://doi.org/10.1117/12.938211
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KEYWORDS
Metrology

Objectives

Reflectivity

Microscopes

Photomasks

Scanners

Sensors

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