27 October 1978 Description Of A Unique Machine Tool Permitting Achievement Of <15-Å rms Diamond-Turned Surfaces
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Abstract
A new machine tool now in the final stages of development at Battelle, Pacific Northwest Laboratories uses a unique tool motion to produce diamond-turned surfaces of exceptionally high quality. Copper surfaces of revolution have been produced with a 12.3-A rms surface finish and a contour accuracy of 75 nm. The cutting tool is programmed to move in 4 nm increments along two axes: one linear (X) axis and one circular (Omega) axis. Exceptionally stiff and accurate control of the tool is possible with this "Omega-X" system. In conjuction with a unique thermally stabilized air bearing spindle and machine calibration equipment, the Omega-X system permits a significant advance in the fabrication of optical-quality surfaces.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. M. Miller, G. H. Hauver, J. N. Culverhouse, E. N. Greenwell, "Description Of A Unique Machine Tool Permitting Achievement Of <15-Å rms Diamond-Turned Surfaces", Proc. SPIE 0159, Precision Machining of Optics, (27 October 1978); doi: 10.1117/12.956834; https://doi.org/10.1117/12.956834
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