Precision machine tools are designed and fabricated with a great deal of consideration given to maintaining as smooth and precise a motion as possible between the cutting tool and workpiece. Air bearing slides and spindles along with pneumatic isolation systems are used to eliminate many of the mechanical disturbances associated with other machine tools. Unfortunately, the slide drive mechanism used in most cases is the ball nut/lead screw which introduces vibration and slide positioning errors due to the mechanical gearing. To avoid these problems a linear-induction-motor slide drive system has been developed which has no mechanical coupling between the motor's stationary and moving members. When interfaced with a laser interferometer position transducer, this drive system is capable of producing slide position accuracies of better than 3 microinches when driving a 1,000 lb. mass between 0 and 4 ipm. The paper describes this and other efforts that are continuing to extend the system capabilities to drive masses up to 10,000 lbs.