Two high-speed, multi-actuator deformable mirrors have been characterized in terms of their abilities to provide low order Zernike mode shapes. Both mirrors are piezoelectrically activated with one having 61 actuators in a concentric circular array and the other having 52 actuators in a cornertruncated square array. Tilt, focus and astigmatism modes have been imposed with good linearity and fidelity. Superposition of multiple modes has also been successfully demonstrated. Problems encountered are listed.
John R. Kenemuth,
"Multi-Actuator Deformable Mirror Evaluations", Proc. SPIE 0171, Optical Components: Manufacture and Evaluation, (4 April 1979); doi: 10.1117/12.957041; https://doi.org/10.1117/12.957041