Laboratory Evaluation Of A High-Resolution X-Ray Microscope

J. K. Silk

doi:10.1117/12.957433

9 August 1979 Laboratory Evaluation Of A High-Resolution X-Ray Microscope

J. K. Silk

Proceedings Volume 0184, Space Optics Imaging X-Ray Optics Workshop; (1979) https://doi.org/10.1117/12.957433
Event: 1979 Huntsville Technical Symposium, 1979, Huntsville, United States

Abstract

High spatial resolution X-ray microscopes are being developed for autoradiography of laser fusion reactions and for relay optics, linking an X-ray telescope to focal plane instrumentation such as a photoelectric image detector or a spectrometer. The grazing-incidence optics consist of confocal axisymmetric ellipsoid and hyperboloid pairs. In both fields of application, high spatial resolution is required. The achievement of high spatial resolution involves meeting exacting tolerances on the figure and smoothness of the reflecting surfaces. The performance of a set of optics with 10X magnification has been evaluated in laboratory X-ray testing. The tests consist primarily of imaging various targets illuminated with soft X-rays, and recording the images on photographic film. In this paper we present the first results of the testing which show that resolu-tion of 1-2 Am has been achieved and that the reflection efficiency of the instrument is nearly 100 percent. We include information on the depth of focus and field of view.

Citation Download Citation

J. K. Silk "Laboratory Evaluation Of A High-Resolution X-Ray Microscope", Proc. SPIE 0184, Space Optics Imaging X-Ray Optics Workshop, (9 August 1979); https://doi.org/10.1117/12.957433

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