Surface Roughness Measurement Of Aspheric Surfaces

Anthony M. Ledger

doi:10.1117/12.957448

9 August 1979 Surface Roughness Measurement Of Aspheric Surfaces

Anthony M. Ledger

Proceedings Volume 0184, Space Optics Imaging X-Ray Optics Workshop; (1979) https://doi.org/10.1117/12.957448
Event: 1979 Huntsville Technical Symposium, 1979, Huntsville, United States

Abstract

A method of measuring the surface roughness of aspheric surfaces has been developed. This method combines surface replication techniques and FECO (fringes of equal chromatic order) interferometry to avoid many of the practical ligtitations of the more conventional techniques. A series of measurements was taken of a 30A calibration sample ovpr a long period of time and gave an average measured surface roughness by replication of 33A ±8A.

Citation Download Citation

Anthony M. Ledger "Surface Roughness Measurement Of Aspheric Surfaces", Proc. SPIE 0184, Space Optics Imaging X-Ray Optics Workshop, (9 August 1979); https://doi.org/10.1117/12.957448

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