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25 December 1979 Noncontact, Laser Interferometer Sweep Gage
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Abstract
Parts that are manufactured with diamond tools on precision machines typically exhibit high-quality surfaces and contours. One technique for characterizing these machines is to fabricate a spherical teEt part from the material of interest so that the multiaxes contouring capability can be evaluated. Because most materials that can be diamond turned easily are also damaged easily, a noncontact, rotary inspection machine has been developed that utilizes a focused beam from a laser interferometer to measure perturbations in the surface of reflective parts. Digital output data from the laser display is converted to an analog signal that is available for additional processinkT to provide contour and/or surface texture information. A mastering sequence is also available that utilizes an air-bearing linear variable differential transformer (LVDT) to permit noncontact measurement of part size.
© (1979) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. E. Barkman "Noncontact, Laser Interferometer Sweep Gage", Proc. SPIE 0192, Interferometry, (25 December 1979); https://doi.org/10.1117/12.957850
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