25 December 1979 The Zygo Interferometer System
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Abstract
The Zygo Interferometer System is designed to be suitable for a large spectrum of measurement applications. The fact that it has been widely accepted and is being used in its various configurations establishes the viability of the system architecture upon which it is based. The purpose of this paper is to provide a comprehensive description of this system so as to establish a base-line for what this state-of-the-art and off-the-shelf system can provide.
© (1979) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul F. Forman, "The Zygo Interferometer System", Proc. SPIE 0192, Interferometry, (25 December 1979); doi: 10.1117/12.957835; https://doi.org/10.1117/12.957835
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