25 December 1979 The Zygo Interferometer System
Author Affiliations +
The Zygo Interferometer System is designed to be suitable for a large spectrum of measurement applications. The fact that it has been widely accepted and is being used in its various configurations establishes the viability of the system architecture upon which it is based. The purpose of this paper is to provide a comprehensive description of this system so as to establish a base-line for what this state-of-the-art and off-the-shelf system can provide.
© (1979) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul F. Forman, Paul F. Forman, } "The Zygo Interferometer System", Proc. SPIE 0192, Interferometry, (25 December 1979); doi: 10.1117/12.957835; https://doi.org/10.1117/12.957835


Shape measurement of freeform optics
Proceedings of SPIE (June 14 2018)
Tilted wave interferometry for testing large surfaces
Proceedings of SPIE (August 06 2018)
Interferometric testing for large optical elements
Proceedings of SPIE (October 05 2000)

Back to Top