Macroelectronic Photolithography: IÃ¢â‚¬â€?The Optimization Of Photoresist Application By Roller Coating

R. A. Bond; H. M. Naguib

doi:10.1117/12.958627

5 September 1980 Macroelectronic Photolithography: I-The Optimization Of Photoresist Application By Roller Coating

R. A. Bond, H. M. Naguib

Proceedings Volume 0221, Developments in Semiconductor Microlithography V; (1980) https://doi.org/10.1117/12.958627
Event: Semiconductor Microlithography V, 1980, San Jose, United States

Abstract

Macroelectronic photolithography is an extension of conventional photolithographic processes to produce high resolution patterning of thin film integrated circuits over large area substrates. Such patterns are needed in fabricating the addressing circuitry for flat panel liquid crystal displays. The first important step in macroelectronic photolithography involves the development of reliable large area coating processes for photoresist materials. This paper deals with the optimization of the roller coating process for Shipley AZ-1350 J positive photoresist to achieve a resolution of 4 μm line widths and spacings extended and distributed over 10 cm x 10 cm glass substrates. Resist viscosity, doctor bar pressure and roller/substrate interference level were investigated to achieve resist thickness uniformity of ±0.1 μm; this variation in resist thickness would cause a variation of ±0.6 μm in line width. Other problems associated with the photofabrication of thin film macrocircuits are discussed. These include mask preparation, inspection and etching processes. Anticipated solutions to these problems are briefly outlined.

Citation Download Citation

R. A. Bond and H. M. Naguib "Macroelectronic Photolithography: I-The Optimization Of Photoresist Application By Roller Coating", Proc. SPIE 0221, Developments in Semiconductor Microlithography V, (5 September 1980); https://doi.org/10.1117/12.958627

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available