5 September 1980 Optics In The Model 900 Projection Stepper
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Abstract
Unique optical design features were incorporated into the Model 900 Projection Stepper. The f/4 illuminator uses a pulsed 200 w mercury short arc lamp and a glass light pipe to achieve a uniform intensity of .5 w/cm2 at the reticle. The 1:1 projection lens is a folded, double-pass design which consists of a concave mirror and a cemented achromat-prism assembly. With a numerical aperture of .30, the lens achieves diffraction-limited performance at both the g and h mercury lines. Reticle to wafer alignment is detected through the lens and corrected automatically at each exposure step.
© (1980) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ron Hershel, Ron Hershel, } "Optics In The Model 900 Projection Stepper", Proc. SPIE 0221, Developments in Semiconductor Microlithography V, (5 September 1980); doi: 10.1117/12.958622; https://doi.org/10.1117/12.958622
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