Device Parameters And Optical Performance Of A Stacked Actuator Deformable Mirror

J. H. Everson; R. E. Aldrich; M. Cone; J Kenemuth

doi:10.1117/12.958766

15 August 1980 Device Parameters And Optical Performance Of A Stacked Actuator Deformable Mirror

J. H. Everson, R. E. Aldrich, M. Cone, J Kenemuth

Proceedings Volume 0228, Active Optical Devices and Applications; (1980) https://doi.org/10.1117/12.958766
Event: 1980 Technical Symposium East, 1980, Washington, D.C., United States

Abstract

A discrete-actuator, deformable mirror has been characterized for use in the infrared spectral region. This device, with a clear aperture diameter of nine inches, achieves a surface deformation of 8.5 μm at 1500 volts. Conformity of the reflective surface with a desired figure has been determined by interferometric analysis and residual error computation for focus, tip, tilt and two orders of astigmatism.

Citation Download Citation

J. H. Everson, R. E. Aldrich, M. Cone, and J Kenemuth "Device Parameters And Optical Performance Of A Stacked Actuator Deformable Mirror", Proc. SPIE 0228, Active Optical Devices and Applications, (15 August 1980); https://doi.org/10.1117/12.958766

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