13 May 1981 High-Precision Measurement Of Aspheric Surfaces
Author Affiliations +
Proceedings Volume 0235, Aspheric Optics: Design, Manufacture, Testing; (1981) https://doi.org/10.1117/12.958966
Event: Aspheric Optics: Design, Manufacture, Testing, 1980, London, United Kingdom
We report the operation of a new instrument which measures with ± 5 nm precision the shape of steep aspheric surfaces. The instrument makes use of contacting probes, and its working is based on an optical differential technique. Special attention is paid to the mechanical construction, and a detailed error analysis is given.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. G. Dil, J. G. Dil, W. Mesman, W. Mesman, J. C. Driessen, J. C. Driessen, } "High-Precision Measurement Of Aspheric Surfaces", Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); doi: 10.1117/12.958966; https://doi.org/10.1117/12.958966

Back to Top