Paper
13 May 1981 Noncontacting Measurement Of Surface Roughness
W. T. Welford
Author Affiliations +
Proceedings Volume 0235, Aspheric Optics: Design, Manufacture, Testing; (1981) https://doi.org/10.1117/12.958970
Event: Aspheric Optics: Design, Manufacture, Testing, 1980, London, United Kingdom
Abstract
For many purposes it is useful to describe a rough surface by some statistical parameters rather than deterministically; thus the variance of surface height and the correlation length may be useful statistical parameters which summarize the properties of surfaces produced by given methods. The use of scattered coherent light to obtain these parameters will be explained.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. T. Welford "Noncontacting Measurement Of Surface Roughness", Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); https://doi.org/10.1117/12.958970
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Cited by 3 scholarly publications.
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