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For many purposes it is useful to describe a rough surface by some statistical parameters rather than deterministically; thus the variance of surface height and the correlation length may be useful statistical parameters which summarize the properties of surfaces produced by given methods. The use of scattered coherent light to obtain these parameters will be explained.
W. T. Welford
"Noncontacting Measurement Of Surface Roughness", Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); https://doi.org/10.1117/12.958970
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W. T. Welford, "Noncontacting Measurement Of Surface Roughness," Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); https://doi.org/10.1117/12.958970