15 May 1981 Small-Computer Diaital Image Analysis
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Proceedings Volume 0236, 1980 European Conf on Optical Systems and Applications; (1981) https://doi.org/10.1117/12.958996
Event: 1980 European Conference on Optical Systems and Applications, 1980, Utrecht, Netherlands
Abstract
The digital image analysis system (DIAS) is a software-oriented, computer-based approach to automatic image analysis. In this paper, some aspects of DIAS are discussed that can be performed with commercially available image pickup equipment attached to an optical microscope and linked to a sensor-based small computer (such as a System/7 or a Series/1). Through the application of an optical edge detection program, the system is adapted to precision measurement of linewidths and other parameters on semiconductor and garnet wafer patterns.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan M. Engel, Jan M. Engel, } "Small-Computer Diaital Image Analysis", Proc. SPIE 0236, 1980 European Conf on Optical Systems and Applications, (15 May 1981); doi: 10.1117/12.958996; https://doi.org/10.1117/12.958996
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