25 February 1981 Monolithic Integration Of Optical Sources And Detectors
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Abstract
A review is given of recent progress in the development of integrated optical circuits involving the GaAs/A/GaAs double heterostructure system. Various devices utilizing period-ic corrugations or gratings are described briefly, whereas alternate attempts to fabricate optical circuits by chemical etching are discussed in more detail. The current trend to explore other III-V compounds is considered, with emphasis on the quaternary system InGaAsP. Recent advances in processing techniques suitable for optical integration, such as reactive-ion etching, laser and electron-beam processing, and the formation of ring lasers, are described, as well as the trend towards integration of optical and electronic devices.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James L. Merz, James L. Merz, } "Monolithic Integration Of Optical Sources And Detectors", Proc. SPIE 0239, Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications, (25 February 1981); doi: 10.1117/12.959187; https://doi.org/10.1117/12.959187
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