10 February 1981 A Simple Method For Determining The Groove Depth Of Holographic Gratings
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Abstract
A method for determining the groove depth of a sinusoidal holographic grating is presented, which makes use of a laser to measure the efficiency in two simple geometries; at normal incidence, and in Littrow configuration. The efficiencies measured are compared to theoretical values to determine the groove depth. Measured efficiencies are plotted versus groove depth and appear to fit very well to corresponding theoretical curves. Some gratings were also studied by a scanning electron microscope. The groove depths measured from the SEM photographs are compared to those derived from efficiency measurements.
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Sten Lindau, "A Simple Method For Determining The Groove Depth Of Holographic Gratings", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965642; https://doi.org/10.1117/12.965642
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