10 February 1981 Holographic Surface Grating Fabrication Techniques
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Diffraction gratings on the surfaces of optical substrates have been demonstrated to perform functions such as beam sampling and infrared polarization. These surface gratings are defined by holographic exposure and ion beam sputter etched into a gold layer on the substrate. The patterns can be designed with spatially varying periods to provide optical power in the diffracted beam and they can cover large areas on flat or non-flat surfaces. High grating accuracy and edge definition result in improved performance when compared to conventional fabrication techniques.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anson Au, Anson Au, Hugh L. Garvin, Hugh L. Garvin, } "Holographic Surface Grating Fabrication Techniques", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965628; https://doi.org/10.1117/12.965628

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