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10 February 1981 Scattering From High Efficiency Diffraction Gratings
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Scatter from high efficiency, reflective diffraction gratings has been characterized. Three major types of scatter are identified: (1) random, which occurs over 27 s.r., (2) band or ghost scatter which occurs in the plane of incidence and (3) structured scatter which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 pm on gratings made by ruling, ion-etching, holography, or a combination of these techniques. We have found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. J. Dunning and M. L. Minden "Scattering From High Efficiency Diffraction Gratings", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981);

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