10 February 1981 Use Of Diffraction Patterns As A Regularity Diagnostic For Jittered Arrays Of Periodic Structures
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Abstract
We describe a model which gives a general expression for the two-dimensional spectral properties of periodic structures of grains perturbed by random jitter. The theoretical formulation is valid no matter what may be the form of the grains of the probability density function of the jitter. The power spectrum of such arrays of grains is a mixed spectrum containing both a continuous term and a discrete line structure. As the intensity of the random jitter is increased, the relative intensity of the line components decreases. Experimental results, obtained with computer simulated arrays of grains, are in excellent agreement with theoretical model. Using Fourier techniques, experimental power spectra are obtai-ned by an analogic optical method (Fraunhoffer diffraction) as well as by computer calculations (Fast Fourier Transform). The results presented here permit a quantitative determination of arrangement quality of periodic structures, randomly perturbed by jitter.
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C. Aime, F. Martin, "Use Of Diffraction Patterns As A Regularity Diagnostic For Jittered Arrays Of Periodic Structures", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); doi: 10.1117/12.965667; https://doi.org/10.1117/12.965667
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