Vacuum Ultraviolet Gratings

Bernhard W. Bach

doi:10.1117/12.965658

10 February 1981 Vacuum Ultraviolet Gratings

Bernhard W. Bach

Proceedings Volume 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I; (1981) https://doi.org/10.1117/12.965658
Event: 24th Annual Technical Symposium, 1980, San Diego, United States

Abstract

Grating efficiencies in the vacuum ultraviolet have historically ranged up to 42% absolute on plane gratings overcoated with AIMgF2 for 1216A. This has been primarily achieved with spacings of 1200 1/mm to 3600 1/mm at blaze angles of 4° and greater. Gratings with less than 1200 1/mm at blaze angles of 2° and below have shown to reflect 10 to 30%. Gratings finer than 360C 1/mm were, (until now), only available when holographically produced. A better understanding of the factors limiting groove smoothness has made it possible to rule improved diffraction gratings for the vacuum ultraviolet. At 200 1/mm we have achieved absolute efficiency of 63% @ 1216A and with 6000 1/mm, 33 to 35% @ 1216A. These improved efficiencies have been possible on spherical and non spherical surfaces.

Citation Download Citation

Bernhard W. Bach "Vacuum Ultraviolet Gratings", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); https://doi.org/10.1117/12.965658

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