31 October 1980 Selected Applications of Laser Technology In Semiconductor Manufacture
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The Nd:YAG laser is now being employed in a number of cost effective applications in semiconductor manufacture. Three of these are briefly reviewed: (1) the use of the CW-pumped, repetitively Q-switched Nd:YAG laser for dicing of circular die for power devices, (2) the application of a small, passively Q-switched, pulse-pumped Nd:YAG laser for repair of defects in hard-surface photomasks and (3) the use of a CW-pumped, Nd:YAG laser with internal second-harmonic-generator, for direct diffusion of dopants to produce back-side ohmic contacts.
© (1980) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert A. Kaplan, Robert A. Kaplan, } "Selected Applications of Laser Technology In Semiconductor Manufacture", Proc. SPIE 0247, Advances in Laser Engineering and Applications, (31 October 1980); doi: 10.1117/12.959372; https://doi.org/10.1117/12.959372


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