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31 December 1980 Ultimate Limits In Optical Alignment
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The accuracy and precision of optical alignment ultimately depend on the accuracy and precision of estimating the position of the pattern of light radiation. When the light radiation is sensed with an array of electronic photodetectors, the position is estimated from the photoelectric counts registered by the detectors. The probability distribution of the counts is used to establish the most elementary bound (Cramer-Rao) for variance of a set of position estimates. The corresponding minimum number of signal photons necessary to perform the measurement (estimation) with specified accuracy is established and its dependence on background noise and random fluctuations in signal intensity is examined. The results are of interest in all those applications for which the accuracy of the measurements has to be much better than the diffraction spread introduced by the collecting aperture.
© (1980) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marek Elbaum and Jerry Nowakowski "Ultimate Limits In Optical Alignment", Proc. SPIE 0251, Optical Alignment I, (31 December 1980);


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