3 March 1981 Characterization Of Scattering From Diamond-Turned Surfaces
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Proceedings Volume 0257, Radiation Scattering in Optical Systems; (1981) https://doi.org/10.1117/12.959613
Event: 1980 Huntsville Technical Symposium, 1980, Huntsville, United States
Abstract
Methods of characterizing t roughness of and scattering from plane single-point diamond-turned surfaces include Nomarski mlcroscopy, microscopic double-beam and multiple-beam interferometry, mechanical profilometry, normalized scatter, and BRDF measurements. Size and curvature parameters limit the usefulness of some of these techniques in the study of nonflat, real-life hardware. A nartial solution to the problems of characterizing curved surfaces is t use replication methods. Polishing reduces the surface roughness and scattering from nonflat single-point diamond-turned surfaces.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven R Lange, Steven R Lange, Robert E. Parks, Robert E. Parks, "Characterization Of Scattering From Diamond-Turned Surfaces", Proc. SPIE 0257, Radiation Scattering in Optical Systems, (3 March 1981); doi: 10.1117/12.959613; https://doi.org/10.1117/12.959613
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