30 April 1981 A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities
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Abstract
A unique differential spectrometer has been developed for the quantitative examination of surfaces. It combines a tuneable pulsed dye laser light source, a flexible precision sample holder, silicon photodiode-in-integrating sphere detectors, and a desktop computer controller/analyzer. This combination enables very precise measurements--twiddlel% systematic errors and twiddle.02% random errors in reflection and transmission measurements. The spectrome-ter has been applied to the investigation of the structure of various component films used in semiconductor devices and in a basic study of the molecular-molecular interactions of dyes adsorbed on surfaces. With only minor modifications, this device can make transient spectroscopy measurements with a resolution of twiddle 10 nsec. It can also be used for a variety of modulation spectroscopies. We will be exploring those areas in the future.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. B. Stephens, R. B. Stephens, G. K. Sorensen, G. K. Sorensen, } "A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931712; https://doi.org/10.1117/12.931712
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