30 April 1981 Ellipsometric Configurations And Techniques
Author Affiliations +
Abstract
Classical and new ellipsometric configurations and techniques are briefly reviewed. This includes null and photometric ellipsometry; azimumetry (ellipsometry based on azimuth measurements alone); film-substrate ellipsometry based upon detection of special values of ψ and Δ at certain angles of incidence; surface-modulated ellipsometry and AIDER (angle-of-incidence derivative ellipsometry and reflectometry).
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. M. A. Azzam, "Ellipsometric Configurations And Techniques", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931704; https://doi.org/10.1117/12.931704
PROCEEDINGS
8 PAGES


SHARE
Back to Top