30 April 1981 Ellipsometric Configurations And Techniques
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Abstract
Classical and new ellipsometric configurations and techniques are briefly reviewed. This includes null and photometric ellipsometry; azimumetry (ellipsometry based on azimuth measurements alone); film-substrate ellipsometry based upon detection of special values of ψ and Δ at certain angles of incidence; surface-modulated ellipsometry and AIDER (angle-of-incidence derivative ellipsometry and reflectometry).
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. M. A. Azzam, R. M. A. Azzam, } "Ellipsometric Configurations And Techniques", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931704; https://doi.org/10.1117/12.931704
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