Classical and new ellipsometric configurations and techniques are briefly reviewed. This includes null and photometric ellipsometry; azimumetry (ellipsometry based on azimuth measurements alone); film-substrate ellipsometry based upon detection of special values of ψ and Δ at certain angles of incidence; surface-modulated ellipsometry and AIDER (angle-of-incidence derivative ellipsometry and reflectometry).
R. M. A. Azzam, R. M. A. Azzam,
"Ellipsometric Configurations And Techniques", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931704; https://doi.org/10.1117/12.931704