31 March 1982 Using E-Beam Written Computer-Generated Holograms To Test Deep Aspheric Wavefronts
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The use of computer-generated holograms (CGHs) to test aspheric surfaces fabricated by modern optical methods such as diamond-turned machining has become increasingly important. The making of CGHs may, however, be limited in spatial resolution and space-bandwidth product provided by commercial optical recording devices. We will demonstrate that CGHs of high spatial resolution and large space-bandwidth product can be written directly on electron-resist using e-beam lithography. This approach not only reduces plotti9g errors normally introduced by optical recording devices, but also provides more than 100 distor-tion-free resolution picture elements in a synthetic hologram of correct size. In this paper, we will discuss how to make such a synthetic hologram by means of e-beam lithography. The performance of this CGH will be demonstrated by comparing with a non-rotationally symmetric aspheric wavefront of over 100 waves of spherical aberration using a concave mirror and plane parallel plate combination as the test piece.
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K. M. Leung, K. M. Leung, S. M. Arnold, S. M. Arnold, J. C. Lindquist, J. C. Lindquist, } "Using E-Beam Written Computer-Generated Holograms To Test Deep Aspheric Wavefronts", Proc. SPIE 0306, Contemporary Methods of Optical Fabrication, (31 March 1982); doi: 10.1117/12.932745; https://doi.org/10.1117/12.932745

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