Manufacture And Measurement Of Ion-Etched X-Ray Diffraction Gratings

C. A. Wallace; G. D. Ludbrook; M. Stedman

doi:10.1117/12.933005

3 May 1982 Manufacture And Measurement Of Ion-Etched X-Ray Diffraction Gratings

C. A. Wallace, G. D. Ludbrook, M. Stedman

Proceedings Volume 0315, Reflecting Optics for Synchrotron Radiation; (1982) https://doi.org/10.1117/12.933005
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

X-ray and EXUV diffraction gratings for synchrotron radiation are made from a ho lographically recorded master by ionetching very shallow groove profiles into the super-smooth surface of a stable silica material. Both rectangular and saw-tooth grating profiles are produced. The gratings are evaluated using optical, contacting stylus and X-ray calibration techniques.

Citation Download Citation

C. A. Wallace, G. D. Ludbrook, and M. Stedman "Manufacture And Measurement Of Ion-Etched X-Ray Diffraction Gratings", Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); https://doi.org/10.1117/12.933005

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