3 May 1982 Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings
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Proceedings Volume 0315, Reflecting Optics for Synchrotron Radiation; (1982) https://doi.org/10.1117/12.932997
Event: 1981 Brookhaven Conferences, 1981, Upton, United States
The deposition of multilayer coatings for reflective filters in the extreme UV region is controlled by measuring the reflection of soft x-rays during the coating process. The x-ray source is aligned for every layer at the angle at which the maximas and minimas coincide with the peaks and valleys of the standing wave of the filter. The accuracy of the positioning between source and substrate has to be better than 1/50 degrees.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arno K. Hagenlocher, Arno K. Hagenlocher, } "Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings", Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); doi: 10.1117/12.932997; https://doi.org/10.1117/12.932997


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