24 March 1982 Conference Summary High Resolution Soft X-Ray Optics
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Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933156
Event: 1981 Brookhaven Conferences, 1981, Upton, United States
Abstract
The main topics discussed at the Conference were multilayer mirror optics and their applications, the manufacture and metrology of X-ray optical components, and microfabrication, particularly of zone plates for X-ray microscopy. The attainment of high resolution and the full potential of multilayer mirrors will require advances to be made in manufacturing technology, metrology and in the selection of suitable substrate materials.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Franks, A. Franks, } "Conference Summary High Resolution Soft X-Ray Optics", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933156; https://doi.org/10.1117/12.933156
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