Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays

I. Lovas; W. Santy; E. Spiller; R. Tibbetts; J. Wilczynski

doi:10.1117/12.933138

24 March 1982 Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays

I. Lovas, W. Santy, E. Spiller, R. Tibbetts, J. Wilczynski

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933138
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Recently developed multilayer coatings permit use of normal incidence optics for soft x-rays promising a resolution that should be substantially better than that obtained with grazing incidence optics. We describe the design and assembly of a Schwarzschild objective for a scanning x-ray microscope. The Schwarzschild objective, consisting of two nearly concentric spherical mirrors promises diffraction-limited resolution for soft x-rays.

Citation Download Citation

I. Lovas, W. Santy, E. Spiller, R. Tibbetts, and J. Wilczynski "Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933138

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