Diamond Machining And Mechanical Inspection Of Optical Components

R. R. Donaldson; S. R. Patterson; D. C. Thompson

doi:10.1117/12.933123

24 March 1982 Diamond Machining And Mechanical Inspection Of Optical Components

R. R. Donaldson, S. R. Patterson, D. C. Thompson

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933123
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Displacement measurement and motion control are discussed for rotary and linear axes of motion, as necessary for the dimensional measurement and diamond-tool machining of grazing incidence x-ray optics. Examples of available performance levels are drawn from measurements made on current developmental hardware, and are coupled with speculation on possible future extensions.

Citation Download Citation

R. R. Donaldson, S. R. Patterson, and D. C. Thompson "Diamond Machining And Mechanical Inspection Of Optical Components", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933123

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